Lezi Xinchuang Automation Equipment (Shanghai) Co., Ltd.

The RR481/boomerang arm vacuum robot (double-arm) realizes the high positioning repeatability and highly reliable vacuum partition performance by adopting DDM (vacuum direct drive motor) for the drive section. The arm mechanism driven by steel belt realizes the adoption of long end-effector even with small rotation area.

Small rotation area.

Long end-effector available for long reach.

Available for narrow gate opening size (15mm).

High accuracy.

Available for ultrahigh vacuum.

High throughput.

Available for the AWC option (wafer position compensation).

Substrate size	Up to 300mm wafer
Capacity	3.0kg/10 Nm, Note: For wrist attachment section (including end-effector)
Transfer distance of substrate center	715mm (for 300mm wafer)
Z-axis stroke	70mm/140mm
Rotation range	Rotation not limited
Rotation diameter	530mm
Transfer accuracy (X,Y)	±0.1mm
Mass	100kg
Vacuum-proof level	10E-6 Pa
He leakage rate	5x10E-9 Pa.m3/sec He (Base vacuum 5x10E-4 Pa)
Operating temperature	80℃ or less
Materials used in vacuum	Alminum, Stainless steel, AM350 (Bellows), Magnet with Ni plating spec., Fluorine-based O-ring
Motor specifications	Vacuum direct drive motor (Z-axis: Servo motor)
Encoder specifications	ABS
Utility	48V DC (motor drive), 24V DC (communication)
Communication specifications	TCP/IP
Option	Teaching pendant, Power unit (200 V AC input)

RR481 Series（L200/L230/L300）