• 图片6.jpg
  • 图片7.jpg

RV201-F07-0

The model RV201-F07-0 is a standard load port. RORZE’s original opening/closing mechanism is used, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.

Available for FOUP and Auto Door FOSB as a standard.

High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.

Power supply DC24V±10% 6A
Compressed air 0.5MPa to 0.6MPa 10L/min or more
Vacuum -60kPa to -80kPa, 10L/min or more
N2: -