The model RV201-F07-N is a N2 bottom purge type load port. Original nozzle mechanism is used for gas control by mass flow controller. The door opening/closing mechanism of the standard model is inherited, opening/closing of the FOUP door is precisely controlled, and high level cleanliness performance is realized.
Available for FOUP and Auto Door FOSB as a standard.
High cleanliness performance is attained by the original door opening/closing mechanism and precise motion control.
Low pressure loss filter is built in.
Original nozzle is mounted.