Equipped with a new clean robot and a high-speed direct-drive walking axis, it can achieve high-speed transmission.
You can choose the standard model or choose a highly customizable model and match various modules according to your needs.
The pick and place method can be selected as O-RING, Vacuum, or Edge Clamp. (OPTION)
Two aligners can be optional to achieve higher productivity. (OPTION)
Can correspond to OHT and AGV. (OPTION)
Can achieve 200/300mm compatibility. (OPTION)
Optional FFU, ion bar, additional buffer and other functional modules. (OPTION)
You can choose a LOAD PORT corresponding to N2/XCDA purge. (OPTION)
Optional handheld controller. (OPTION)